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Hideo Kato

USPTO Granted Patents = 11 (Patent Applications = 1)

Average Co-Inventor Count = 3.1

ph-index = 2

Forward Citations = 35(Granted Patents)

Location History:

Nirasaki, JP (2010)
Miyagi, JP (2016 - 2023)

Company Filing History:

11 out of 10,295

Tokyo Electron Limited

Years Active: 2010-2023

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11646178 - Apparatus for plasma processing (2023-05-09),

2. 11372058 - Impedance matching device, abnormality diagnosis method, and storage medium for abnormality diagnosis program (2022-06-28),

3. 10510513 - Plasma processing device and high-frequency generator (2019-12-17),

4. 10109463 - Microwave automatic matcher and plasma processing apparatus (2018-10-23),

5. 10074524 - Plasma processing apparatus and high frequency generator (2018-09-11),

6. 9977070 - Method for inspecting magnetron (2018-05-22),

7. 9761418 - Plasma processing apparatus (2017-09-12),

8. 9646867 - Plasma processing apparatus, power supply unit and mounting table system (2017-05-09),

9. 9418822 - Plasma processing apparatus, plasma processing method and high frequency generator (2016-08-16),

10. 9373483 - Plasma processing apparatus and high frequency generator (2016-06-21),

11. 7682982 - Plasma processing apparatus and control method thereof (2010-03-23),

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