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Nirasaki, Japan

Hideki Tanaka

USPTO Granted Patents = 7

Average Co-Inventor Count = 1.5

ph-index = 3

Forward Citations = 59(Granted Patents)

Location History:

Nirasaki, JP (2007 - 2009)
Yamanashi, JP (2007 - 2009)

Company Filing History:

7 out of 10,295

Tokyo Electron Limited

Years Active: 2007-2009

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7637143 - Substrate processing apparatus and analysis method therefor (2009-12-29),

2. 7630064 - Prediction method and apparatus for substrate processing apparatus (2009-12-08),

3. 7505879 - Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatus (2009-03-17),

4. 7389203 - Method and apparatus for deciding cause of abnormality in plasma processing apparatus (2008-06-17),

5. 7341954 - Method and apparatus for determining an operation status of a plasma processing apparatus, program and storage medium storing same (2008-03-11),

6. 7231321 - Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus (2007-06-12),

7. 7217942 - Plasma leak monitoring method, plasma processing apparatus and plasma processing method (2007-05-15),

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