This inventor holds 3 USPTO granted patents and 2 published patent applications. Top assignee: Ulvac, Inc.. Active years: 2010-2024.
Location History:
- Susono, JP (2010)
- Chigasaki, JP (2024)
Company Filing History:
Years Active: 2010-2024
Title: Innovations of Hidekazu Yokoo
Introduction
Hidekazu Yokoo is a prominent inventor based in Susono, Japan. He has made significant contributions to the field of electrostatic technology and ion implantation. With a total of 3 patents to his name, Yokoo's work has advanced various applications in substrate processing.
Latest Patents
Yokoo's latest patents include an electrostatic chuck, a vacuum processing apparatus, and a substrate processing method. The electrostatic chuck is designed to stably support a substrate while minimizing the rapid increase in gas volume. This innovation features a chuck plate with an exhaust passage that effectively removes gas emitted from the substrate. Additionally, his ion implanting apparatus is engineered for manufacturing single crystal films by extracting ions from an ion source and implanting them into a substrate.
Career Highlights
Yokoo is currently employed at Ulvac, Inc., where he continues to develop cutting-edge technologies. His work has been instrumental in enhancing the efficiency and effectiveness of vacuum processing systems.
Collaborations
Some of his notable coworkers include Seiji Ogata and Genji Sakata, who have collaborated with him on various projects within the company.
Conclusion
Hidekazu Yokoo's innovative contributions to electrostatic technology and ion implantation have positioned him as a key figure in his field. His patents reflect a commitment to advancing technology and improving substrate processing methods.