Henry T Chan

Title: **Innovator Spotlight: Henry T Chan - Pioneering Mixed Reality in Semiconductor Manufacturing**

Introduction

Henry T Chan is an accomplished inventor based in Fremont, CA, with a significant contribution to the field of semiconductor manufacturing. With a total of six patents to his name, Chan has made remarkable strides in leveraging mixed reality environments to enhance manufacturing processes.

Latest Patents

Among his latest patents, Chan developed a revolutionary control platform for semiconductor manufacturing equipment that integrates mixed reality (MR) technologies. This platform allows for the operation of manufacturing tools within an MR environment, showcasing data associated with the semiconductor equipment. It features an MR control system that obtains sensor data from manufacturing tools, analyzes operational information, and transmits this data to an MR headset. The headset then renders the content in an immersive MR environment, enhancing operator interaction and efficiency.

Another notable patent focuses on model-based scheduling for substrate processing systems. Chan's innovation involves a neural network model that predicts optimal scheduling parameters for etching tools based on various inputs, such as preventive maintenance operations and recipe times. This sophisticated model is trained using both simulated and real data, enabling it to improve scheduling accuracy, optimize resource utilization, and enhance overall throughput in semiconductor processes.

Career Highlights

Henry T Chan is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment and services. His work there has positioned him as an influential figure in the industry, advocating for technological advancements that streamline manufacturing procedures.

Collaborations

Throughout his career, Chan has collaborated with notable colleagues, including Chung-Ho Huang and Vincent M Wong. Their combined expertise fosters an innovative environment that drives the development of cutting-edge technologies and solutions in semiconductor manufacturing.

Conclusion

Henry T Chan's contributions to the field of semiconductor manufacturing underscore his role as a pivotal inventor. Through his inventive patents, he has propelled the integration of mixed reality technologies in manufacturing processes, leading to improved efficiency and productivity. As he continues to innovate at Lam Research Corporation, Chan's work promises to influence the future of the semiconductor industry significantly.