The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Aug. 31, 2018
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Rainer Unterguggenberger, Newark, CA (US);
Henry Chan, Morgan Hill, CA (US);
Chung-Ho Huang, San Jose, CA (US);
Vincent Wong, Fremont, CA (US);
David Hemker, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); G05B 13/02 (2006.01); G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41865 (2013.01); G05B 13/0265 (2013.01); G05B 23/0267 (2013.01); G05B 23/0283 (2013.01); G05B 2219/25236 (2013.01); G05B 2219/2602 (2013.01); G05B 2219/32128 (2013.01); G05B 2219/36039 (2013.01); G05B 2219/36297 (2013.01); G05B 2219/45031 (2013.01);
Abstract
A system includes an interface and a controller. The interface is configured to receive a state of a substrate processing tool comprising a plurality of process modules configured to process a substrate. The controller is configured to correlate the state with an input previously received by the substrate processing tool from the interface based on the state and to generate an output to control the substrate processing tool based on the correlation.