The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2020

Filed:

Aug. 23, 2018
Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Behzad Lajevardi, Fremont, CA (US);

Willie Ku, Fremont, CA (US);

Tom Trinh, Dublin, CA (US);

Henry Chan, San Jose, CA (US);

Assignee:

LAM RESEARCH CORPORATION, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); H04L 12/24 (2006.01); G06F 3/0484 (2013.01); G01R 13/02 (2006.01); G06F 3/14 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4186 (2013.01); G01R 13/029 (2013.01); G06F 3/0484 (2013.01); G06F 3/14 (2013.01); H04L 41/0803 (2013.01); G05B 2219/25006 (2013.01); G05B 2219/25174 (2013.01);
Abstract

A network interface controller for a communication network of a substrate processing system includes a data collection module configured to monitor a communication bus to retrieve and store data frames transmitted between components of the substrate processing system. A user interface is configured to receive inputs for configuring extraction of data from the data frames. A data processing module is configured to store, based on a network configuration file, a map correlating data within the data frames to of the components of the substrate processing system, extract data from the data frames in accordance with the inputs received by the user interface and the map, and provide, to the user interface, the data as extracted from the data frames. The user interface is further configured to display the data as extracted from the data frames in accordance with the inputs received by the user interface.


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