The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2024

Filed:

Apr. 11, 2022
Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Rainer Unterguggenberger, Newark, CA (US);

Christopher Thorgrimsson, San Ramon, CA (US);

Henry T. Chan, Morgan Hill, CA (US);

Chung-Ho Huang, San Jose, CA (US);

Terrence George Bernier, Hillsboro, OR (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 3/01 (2006.01); G05B 19/042 (2006.01); G06T 15/20 (2011.01); G06T 17/00 (2006.01); G06T 19/00 (2011.01); G06V 20/20 (2022.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 19/0425 (2013.01); G06F 3/012 (2013.01); G06T 15/20 (2013.01); G06T 17/00 (2013.01); G06T 19/006 (2013.01); G06V 20/20 (2022.01); H01L 21/67242 (2013.01); G06T 2200/24 (2013.01);
Abstract

Various embodiments herein relate to a Mixed Reality (MR) control platform to operate a semiconductor manufacturing tool in an MR environment and to display data associated with the semiconductor manufacturing tool. In son embodiments, the MR control platform comprises an MR control system and an MR headset. The MR control system can obtain sensor data representative of sensor output from a semiconductor manufacturing tool. The MR control system can determine operational information associated with the semiconductor manufacturing tool and based on the sensor data. The MR control system can cause the operational information to be transmitted to the MR headset. The MR headset can receive the operational information associated with the semiconductor manufacturing tool from the MR control system. The MR headset can cause content associated with the operational information and one or more control features to be rendered in an MR environment.


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