Henry Shields

Title: Innovations of Henry Shields in EUV Light Source Technology

Introduction

Henry Shields is an accomplished inventor based in San Pedro, California. He holds a total of five patents, showcasing his expertise in the field of extreme ultraviolet (EUV) light source technology. His innovative contributions have significantly advanced the capabilities of EUV radiation sources.

Latest Patents

One of Henry Shields' latest patents is the "Laser-produced plasma EUV light source with pre-pulse enhancement." This invention employs a low energy laser pre-pulse and a high energy laser main pulse to generate EUV radiation. The pre-pulse creates a weak plasma in the target area, enhancing the absorption of the main laser pulse and improving EUV radiation emissions. The timing between the pre-pulse and the main pulse can be adjusted to optimize output intensity.

Another notable patent is the "Laser-produced plasma EUV light source with isolated plasma." This design features a nozzle positioned at a sufficient distance from the target region to prevent significant absorption of EUV radiation by target vapor. This configuration also protects the nozzle from erosion and contamination by the generated EUV radiation.

Career Highlights

Henry Shields has worked with prominent organizations, including the University of Central Florida Research Foundation, Inc. and Northrop Grumman Systems Corporation. His work in these institutions has allowed him to develop and refine his innovative technologies in the field of EUV light sources.

Collaborations

Henry has collaborated with notable colleagues such as Mark E. Michaelian and Steven W. Fornaca. Their combined expertise has contributed to the advancement of EUV technology and its applications.

Conclusion

Henry Shields is a pioneering inventor whose work in EUV light source technology has made a significant impact in the field. His innovative patents and collaborations reflect his dedication to advancing scientific knowledge and technology.