Goleta, CA, United States of America

Hao-Chih Liu


Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 2009-2012

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2 patents (USPTO):Explore Patents

Title: Hao-Chih Liu: Innovator in Nanotechnology

Introduction

Hao-Chih Liu is a prominent inventor based in Goleta, California, known for his contributions to the field of nanotechnology. With a focus on developing advanced nanoprobes, Liu has made significant strides in enhancing the capabilities of semiconductor device inspection.

Latest Patents

Liu holds 2 patents, including his latest innovations: "Sidewall tracing nanoprobes, method for making the same," and "method for use - Sidewall tracing nanoprobes." These patents describe a unique design where the tip shape of the nanoprobe is altered, allowing the diameter of the probe's tip to be wider than that of the supporting stem. This innovative design is achieved through various methods, including subtractive techniques to reduce the stem diameter and additive methods to increase the tip diameter. These sidewall tracing nanoprobes are particularly useful for inspecting semiconductor devices, enabling quantitative evaluations of defects on the side walls of trenches or via holes. Another notable patent involves "Systems and methods for utilizing scanning probe shape characterization," which infers the probe tip dimensions based on its activity since a characterization procedure was performed. This technology allows for corrections in nanoscale measurements, accounting for changes in the probe's geometry due to wear.

Career Highlights

Throughout his career, Liu has worked with esteemed organizations such as the University of California and Veeco Metrology, Inc. His work has significantly impacted the field of metrology and semiconductor inspection.

Collaborations

Liu has collaborated with notable professionals in his field, including Gregory A. Dahlen and Sungho Jin. Their collective expertise has contributed to advancements in nanotechnology and semiconductor research.

Conclusion

Hao-Chih Liu's innovative work in nanotechnology and his contributions to the development of advanced nanoprobes have positioned him as a key figure in the field. His patents reflect a commitment to improving semiconductor device inspection methods, showcasing the importance of innovation in technology.

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