The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Jul. 27, 2007
Sungho Jin, San Diego, CA (US);
Li-han Chen, San Diego, CA (US);
Gregory Dahlen, Santa Barbara, CA (US);
Hao-chih Liu, Goleta, CA (US);
Sungho Jin, San Diego, CA (US);
Li-Han Chen, San Diego, CA (US);
Gregory Dahlen, Santa Barbara, CA (US);
Hao-Chih Liu, Goleta, CA (US);
The Regents of the University of California, Oakland, CA (US);
Abstract
Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.