The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2009
Filed:
Dec. 22, 2006
Applicants:
Tianming Bao, Frisco, TX (US);
Hao-chih Liu, Goleta, CA (US);
Gregory A. Dahlen, Santa Barbara, CA (US);
Rohit Jain, Ventura, CA (US);
Inventors:
Tianming Bao, Frisco, TX (US);
Hao-Chih Liu, Goleta, CA (US);
Gregory A. Dahlen, Santa Barbara, CA (US);
Rohit Jain, Ventura, CA (US);
Assignee:
Veeco Metrology, Inc., Santa Barbara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N 13/10 (2006.01); G12B 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.