University of California

Veeco Metrology, Inc.

Hao-Chih Liu

Gregory A Dahlen

Sungho Jin

Rohit Jain

Li-Han Chen

Tianming Bao

Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.

Sidewall tracing nanoprobes, method for making the same, and method for use

A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Systems and methods for utilizing scanning probe shape characterization

Growing community of inventors

Goleta, CA, United States of America

Hao-Chih Liu