Hanshen Zhang

Title: The Innovative Contributions of Hanshen Zhang

Introduction

Hanshen Zhang is a prominent inventor based in Cupertino, California, known for his significant contributions to the field of semiconductor processing. With a total of 13 patents to his name, Zhang has made remarkable advancements that enhance the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Among his latest patents, Zhang has developed systems and methods for hafnium-containing film removal. This innovative approach involves exemplary etching methods that include flowing a halogen-containing precursor into a substrate processing region of a semiconductor processing chamber. The halogen-containing precursor is characterized by a gas density greater than or about 5 g/L. The methods include contacting a substrate housed in the substrate processing region with the halogen-containing precursor, which defines an exposed region of a hafnium-containing material. The methods also encompass the removal of the hafnium-containing material. Another notable patent focuses on methods and systems to enhance process uniformity. This invention describes a semiconductor processing chamber that includes a remote plasma region and a processing region fluidly coupled with the remote plasma region. The processing region is designed to house a substrate on a support pedestal, which consists of a first material at its interior region and an annular member made of a second material different from the first material.

Career Highlights

Zhang's career is marked by his role at Applied Materials, Inc., where he has been instrumental in driving innovation in semiconductor technology. His work has not only contributed to the company's success but has also advanced the industry as a whole.

Collaborations

Throughout his career, Zhang has collaborated with talented individuals such as Zhenjiang Cui and Jingchun Zhang. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Hanshen Zhang's contributions to semiconductor processing through his innovative patents and collaborative efforts highlight his importance in the field. His work continues to influence the industry and pave the way for future advancements.