Company Filing History:
Years Active: 2005-2007
Title: Hannu Leskinen: Innovator in Atomic Layer Deposition Technologies
Introduction
Hannu Leskinen is a notable inventor based in Espoo, Finland. He has made significant contributions to the field of atomic layer deposition (ALD) technology. With a total of five patents to his name, Leskinen's work focuses on enhancing the efficiency and effectiveness of ALD systems.
Latest Patents
One of his latest patents is a diaphragm valve designed specifically for atomic layer deposition. This shut-off type diaphragm valve features a flexible diaphragm that can transition between an open and closed position. In the open position, the valve passage is partially open, while in the closed position, the diaphragm presses against a valve seat to block the passage. This design facilitates heat transfer between the valve seat and the diaphragm, ensuring optimal performance. Additionally, a heating body is included to maintain the operating temperature at the diaphragm.
Another significant patent by Leskinen is a precursor material delivery system for atomic layer deposition. This system includes a flow path from a precursor container to the reaction space of an ALD reactor. A staging volume is established to receive doses of precursor material, which are then released in a series of pulses toward the reaction space. The system also incorporates a vacuum line to reduce pressure inside the precursor container without drawing particles into the reaction space, ensuring purity and efficiency.
Career Highlights
Hannu Leskinen has built a successful career at Planar Systems, Inc., where he continues to innovate in the field of ALD technology. His expertise and dedication to advancing this technology have positioned him as a key figure in the industry.
Collaborations
Leskinen has collaborated with talented individuals such as Jarmo Maula and Teemu Lang. These partnerships have contributed to the development of cutting-edge technologies in atomic layer deposition.
Conclusion
Hannu Leskinen's contributions to atomic layer deposition technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence advancements in this critical area of research and development.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.