The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Apr. 03, 2006
Jarmo Ilmari Maula, Espoo, FI;
Hannu Leskinen, Espoo, FI;
Teemu Lang, Helsinki, FI;
Pekka Kuosmanen, Espoo, FI;
Kari Härkönen, Kauniainen, FI;
Bradley J. Aitchison, Eugene, OR (US);
Jarmo Ilmari Maula, Espoo, FI;
Hannu Leskinen, Espoo, FI;
Teemu Lang, Helsinki, FI;
Pekka Kuosmanen, Espoo, FI;
Kari Härkönen, Kauniainen, FI;
Bradley J. Aitchison, Eugene, OR (US);
Planar Systems, Inc., Beaverton, OR (US);
Abstract
A shut-off type diaphragm valve adapted for use in an atomic layer deposition system includes a flexible diaphragm operable to flex between an open position whereby a valve passage is at least partially open and a closed position whereby a substantial portion of a first side of the diaphragm is pressed against a valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm. In some embodiments, a heating body thermally contacts the valve body and extends proximal to a second side of the diaphragm opposite the first side thereof to form a thermally conductive pathway that facilitates maintaining an operating temperature at the diaphragm. A thermally resistive member may be interposed between the valve passage and an actuator, such as a solenoid, for attenuating heat transfer between the valve passage and the actuator.