The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Jun. 26, 2003
Jarmo Ilmari Maula, Espoo, FI;
Hannu Leskinen, Espoo, FI;
Teemu Lang, Helsinki, FI;
Pekka Kuosmanen, Espoo, FI;
Kari Härkönen, Kauniainen, FI;
Bradley J. Aitchison, Eugene, OR (US);
Jarmo Ilmari Maula, Espoo, FI;
Hannu Leskinen, Espoo, FI;
Teemu Lang, Helsinki, FI;
Pekka Kuosmanen, Espoo, FI;
Kari Härkönen, Kauniainen, FI;
Bradley J. Aitchison, Eugene, OR (US);
Planar Systems, Inc., Beaverton, OR (US);
Abstract
A shut-off type diaphragm valve adapted for use in an atomic layer deposition system includes a valve seat having an annular seating surface that surrounds an inlet of the valve and extends radially therefrom. The seating surface contacts a substantial portion of the first side of a flexible diaphragm when the diaphragm is closed, to facilitate heat transfer and counteract dissipative cooling of the diaphragm, thereby inhibiting condensation of a medium flowing through the valve passage. The seating surface is preferably flat and smooth, to prevent shearing of an elastomeric diaphragm. For a plastic diaphragm, a ring-shaped seating ridge may extend from the seating surface to cause localized permanent deformation of the diaphragm and enhanced sealing, while still allowing a substantial portion of the diaphragm to contact the seating surface for enhanced heat transfer. Valve speed enhancements and other reliability enhancing features are also described.