The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2005
Filed:
Jun. 26, 2003
Jarmo Ilmari Maula, Espoo, FI;
Hannu Leskinen, Espoo, FI;
Teemu Lang, Helsinki, FI;
Pekka Kuosmanen, Espoo, FI;
Kari Härkönen, Kauniainen, FI;
Bradley J. Aitchison, Eugene, OR (US);
Jarmo Ilmari Maula, Espoo, FI;
Hannu Leskinen, Espoo, FI;
Teemu Lang, Helsinki, FI;
Pekka Kuosmanen, Espoo, FI;
Kari Härkönen, Kauniainen, FI;
Bradley J. Aitchison, Eugene, OR (US);
Planar Systems, Inc., Beaverton, OR (US);
Abstract
A diaphragm valve includes a heating body that thermally contacts a valve body of the valve and extends proximal to a diaphragm of the valve opposite a valve passage through which medium flows. The heating body forms a thermally conductive pathway between the valve body and the diaphragm that facilitates maintaining an operating temperature at the diaphragm. When used in an atomic layer deposition (ALD) system, the diaphragm valve inhibits condensation or freezing of high-temperature ALD precursor gases in the valve passage. A plunger including thermally insulating features preferably extends through a central opening in the heating body to operably couple a valve actuator to the diaphragm. In some embodiments, a thermally resistive member may be interposed between the valve passage and the actuator for attenuating heat transfer between the valve passage and the actuator.