Lexington, MA, United States of America

Han Xu


Average Co-Inventor Count = 2.9

ph-index = 5

Forward Citations = 99(Granted Patents)


Company Filing History:


Years Active: 1998-2002

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5 patents (USPTO):Explore Patents

Title: Han Xu: Innovator in Polymer and Oxide Veil Removal Technologies

Introduction

Han Xu is a notable inventor based in Lexington, MA (US), recognized for his contributions to the field of materials science. He holds a total of 5 patents, showcasing his innovative approach to solving complex engineering challenges. His work primarily focuses on processes that enhance the efficiency of post-etch cleaning in semiconductor manufacturing.

Latest Patents

Among his latest patents, Han Xu has developed methods for dry polymer and oxide veil removal, which are crucial for maintaining the integrity of semiconductor devices. Additionally, he has contributed to a metals removal process that further streamlines the cleaning operations in manufacturing environments.

Career Highlights

Throughout his career, Han Xu has worked with prominent organizations such as Ulvac Technologies, Inc. and the Massachusetts Institute of Technology. His experience in these institutions has allowed him to refine his skills and contribute significantly to advancements in technology.

Collaborations

Han Xu has collaborated with esteemed colleagues, including Richard L. Bersin and Herbert H. Sawin. These partnerships have fostered a rich exchange of ideas and innovations, further enhancing the impact of his work.

Conclusion

In summary, Han Xu is a distinguished inventor whose work in polymer and oxide veil removal technologies has made a significant impact in the field of materials science. His patents and collaborations reflect his commitment to innovation and excellence in engineering.

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