The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1999
Filed:
Apr. 26, 1996
Applicant:
Inventors:
Richard L Bersin, Lawrence, MA (US);
Han Xu, Lexington, MA (US);
Assignee:
Ulvac Technologies, Inc., Methuen, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23F / ; H01L / ;
U.S. Cl.
CPC ...
20419235 ; 20419232 ; 216 18 ; 216 39 ; 216 41 ; 216 67 ; 216 69 ; 438694 ; 438700 ; 438703 ; 438706 ; 438710 ; 438725 ; 438726 ; 438727 ;
Abstract
A method for removing a resist layer, particularly in via holes, includes plasma to remove organic compounds, rinsing the device in deionized water, and sputtering with argon to remove inorganic compounds. The order of rinsing and sputtering can be reversed. These methods avoid the use of acids and industrial solvents.