IDiyas

For the Inventor, By the Inventor

Tokyo, Japan

Haiyang Xu

USPTO Granted Patents = 12 

Average Co-Inventor Count = 2.6

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:

goldMedal12 out of 2,508 
 
Ebara Corporation
 patents

Years Active: 2019-2024

Loading Chart...
12 patents (USPTO):Explore Patents
1. 12042901 - Cleaning liquid supply device, cleaning unit, and storage medium storing program (2024-07-23),
2. 12020976 - Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus (2024-06-25),
3. 12002688 - Substrate cleaning device and substrate cleaning method (2024-06-04),
4. 11996303 - Substrate cleaning device and substrate cleaning method (2024-05-28),
5. 11869788 - Substrate processing device (2024-01-09),
6. 11541502 - Substrate processing apparatus (2023-01-03),
7. 11380561 - Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device (2022-07-05),
8. 11358253 - Cleaning liquid supply device, cleaning unit, and storage medium storing program (2022-06-14),
9. 11164757 - Substrate cleaning device and substrate cleaning method (2021-11-02),
10. 10991615 - Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus (2021-04-27),
11. 10818531 - Substrate transport system, substrate processing apparatus, hand position adjustment method (2020-10-27),
12. 10438817 - Cleaning apparatus and substrate processing apparatus (2019-10-08),

Title: Innovations of Haiyang Xu

Introduction

Haiyang Xu is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of cleaning technology and substrate processing. With a total of 12 patents to his name, Xu continues to push the boundaries of innovation.

Latest Patents

Among his latest patents is a cleaning liquid supply device designed to enhance the efficiency of cleaning devices. This device features a chemical liquid inlet portion and a dilution water inlet portion, along with two chemical liquid control units that manage the flow rates of both chemical liquids and dilution water. Another notable patent is a substrate processing apparatus that allows for the safe removal of substrates from a table without causing damage. This apparatus includes a table, lift pins, and a control device that regulates the movement of the lift pins at varying speeds.

Career Highlights

Haiyang Xu is currently employed at Ebara Corporation, a leading company in the field of fluid machinery and environmental engineering. His work at Ebara has allowed him to develop innovative solutions that address complex challenges in cleaning and substrate processing.

Collaborations

Throughout his career, Xu has collaborated with notable colleagues, including Mitsuhiko Inaba and Koji Maeda. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Haiyang Xu's contributions to innovation in cleaning technology and substrate processing are noteworthy. His patents reflect a commitment to advancing technology and improving efficiency in these fields. His work continues to inspire future innovations.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…