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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10818531 B1

PDFFull Text
Date of Patent:
Oct. 27, 2020

Filed:

Nov. 29, 2018

Substrate transport system, substrate processing apparatus, hand position adjustment method

Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Kuniaki Yamaguchi, Tokyo, JP;

Haiyang Xu, Tokyo, JP;

Koji Maeda, Tokyo, JP;

Mitsuhiko Inaba, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:

BakerHostetler

Primary Examiner:

Kyle O Logan

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); B65G 47/90 (2006.01); H01L 21/67 (2006.01); B25J 9/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67745 (2013.01); B25J 9/163 (2013.01); B65G 47/905 (2013.01); H01L 21/6719 (2013.01); H01L 21/67046 (2013.01); H01L 21/67173 (2013.01); H01L 21/67742 (2013.01); H01L 21/68 (2013.01); H01L 21/68707 (2013.01); H01L 21/67748 (2013.01); H01L 21/67778 (2013.01);
Abstract

A substrate transport system includes a hand, a main positioning member permanently mounted on a base, where the main positioning member is engageable with the hand at a position offset by a first distance in the first axis direction and offset by a second distance in the second axis direction from a substrate transfer position, and a control unit that stores a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.

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Yamaguchi, Kuniaki. (2020). Substrate transport system, substrate processing apparatus, hand position adjustment method (U.S. Patent No. 10818531). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10818531

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