Company Filing History:
Years Active: 2020-2024
Title: Innovations of Mitsuhiko Inaba
Introduction
Mitsuhiko Inaba is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 10 patents to his name, Inaba's work focuses on improving the efficiency and effectiveness of substrate handling and cleaning processes.
Latest Patents
One of Inaba's latest patents is a substrate processing apparatus and method for removing a substrate from the table of a substrate processing apparatus. This invention aims to detach a substrate from a table without causing any damage to the substrate. The apparatus includes a table to hold the substrate, a plurality of lift pins arranged at the periphery of the table, and a drive mechanism that moves the lift pins in a direction perpendicular to the surface of the table. The control device is designed to manage the movement of the lift pins at different speeds, enhancing the precision of the substrate removal process.
Another notable patent is a substrate cleaning device and method. This device features a pressing member that cleans the substrate by making contact with it. It includes a load measurement unit that measures the pressing load of the cleaning member and a control unit that adjusts the pressing amount based on the measured load. This innovative approach ensures optimal cleaning while minimizing the risk of damage to the substrate.
Career Highlights
Mitsuhiko Inaba is currently employed at Ebara Corporation, a leading company in the field of fluid machinery and environmental engineering. His work at Ebara has allowed him to develop cutting-edge technologies that enhance substrate processing capabilities.
Collaborations
Inaba has collaborated with several talented individuals in his field, including Haiyang Xu and Koji Maeda. These collaborations have contributed to the advancement of substrate processing technologies and have fostered innovation within the industry.
Conclusion
Mitsuhiko Inaba's contributions to substrate processing technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in substrate handling and cleaning methods, showcasing the importance of innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.