Haifeng Huang

Title: Haifeng Huang: Innovator in Optical Systems

Introduction

Haifeng Huang is a notable inventor based in Livermore, California. He has made significant contributions to the field of optical systems, holding a total of five patents. His work focuses on enhancing the performance and accuracy of optical systems through innovative designs and methodologies.

Latest Patents

One of Haifeng Huang's latest patents is titled "Correcting aberration and apodization of an optical system using correction plates." This invention discloses an optical system that includes an illumination source, a detector, and collection optics designed to image a sample onto the detector. The system features two or more aberration correction plates located in one or more pupil planes, which provide partial correction of linearly-independent aberration terms. Each correction plate may have a spatially-varying thickness profile to address specific aberration terms effectively.

Another significant patent is "EUV in-situ linearity calibration for TDI image sensors using test photomasks." This patent describes a method for calibrating a TDI photomask inspection tool. A photomask with distinctly patterned regions is illuminated with an EUV beam, and imaging is performed using a TDI sensor. A reference intensity detector measures the EUV light collected, allowing for the determination of the linearity of the TDI sensor based on the imaging results.

Career Highlights

Haifeng Huang has worked with prominent companies in the industry, including Kla Corporation and KLA-Tencor Corporation. His experience in these organizations has contributed to his expertise in optical systems and sensor technologies.

Collaborations

Throughout his career, Haifeng has collaborated with talented individuals such as Rui-Fang Shi and Damon Floyd Kvamme. These collaborations have likely enriched his work and led to innovative advancements in his field.

Conclusion

Haifeng Huang is a distinguished inventor whose work in optical systems has led to multiple patents that enhance the functionality and precision of imaging technologies. His contributions continue to impact the field significantly.