The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

Sep. 25, 2023
Applicant:

Kla Corporation, Milpitas, CA (US);

Inventors:

Haifeng Huang, Livermore, CA (US);

Mitchell Lindsay, Livermore, CA (US);

Eric Vella, Mountain View, CA (US);

Thomas Redding, Tracy, CA (US);

Assignee:

KLA Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/14 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G02B 27/144 (2013.01); G01N 21/8806 (2013.01); G01N 21/9501 (2013.01);
Abstract

A non-polarizing beam splitter can be a rectangular cuboid. A diagonal surface in the beam splitter extends from a corner between the first surface and the second surface at a 45° angle to a point on the third surface or the fourth surface. A beam of light is split into a transmitted beam and a reflected beam using the non-polarizing beam splitter.


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