Company Filing History:
Years Active: 2019
Title: Innovations by Govindarajan Thattaisundaram
Introduction
Govindarajan Thattaisundaram is a notable inventor based in San Jose, CA. He has made significant contributions to the field of technology, particularly in the area of wafer inspection and defect detection. With a total of 3 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of his latest patents is titled "Automatic Recipe Stability Monitoring and Reporting." This invention provides systems and methods for monitoring the stability of a wafer inspection recipe over time. The method involves collecting inspection results generated by wafer inspection tools while performing the recipe on wafers at different points in time. It also includes identifying abnormal variations in the inspection results by comparing them over time. Furthermore, the method determines if the abnormal variation is due to the wafers, the inspection recipe, or the inspection tools, thereby assessing the stability of the recipe.
Another significant patent is "Intra-Die Defect Detection." This invention outlines methods and systems for detecting defects on a specimen. The system includes computer subsystems that acquire images generated by an imaging subsystem at multiple instances of a pattern of interest within a die. The computer subsystems generate a reference image from these instances and compare them to detect defects based on the results of the comparison.
Career Highlights
Govindarajan Thattaisundaram is currently employed at Kla Tencor Corporation, where he continues to innovate and contribute to advancements in technology. His work at the company has positioned him as a key player in the field of wafer inspection.
Collaborations
He has collaborated with notable coworkers, including Hucheng Lee and Lisheng Gao, who have also contributed to the advancements in their respective fields.
Conclusion
Govindarajan Thattaisundaram's innovative patents and contributions to technology highlight his expertise and dedication to improving wafer inspection processes. His work continues to influence the industry positively.