Company Filing History:
Years Active: 2005-2008
Title: The Innovative Contributions of Gerry M Blumenstock
Introduction
Gerry M Blumenstock is a notable inventor based in San Diego, California. He has made significant contributions to the field of extreme ultraviolet (EUV) light sources, holding a total of four patents. His work is characterized by a focus on high-energy photon sources that are compatible with production line requirements.
Latest Patents
One of Blumenstock's latest patents is for an extreme ultraviolet light source. This invention provides a reliable, high-repetition rate, production line compatible high-energy photon source. It involves producing a very hot plasma containing an active material in a vacuum chamber. The active material is an atomic element that emits light within the desired EUV range. The design includes a pulse power source that generates electrical pulses with sufficient energy to produce EUV light at rates exceeding 5 Watts. In preferred embodiments, the EUV light energy at the intermediate focus can reach 45 Watts, extendable to 105.8 Watts.
Another significant patent is for a discharge produced plasma EUV light source. This invention includes a debris mitigation apparatus that employs a metal halogen gas to produce a metal halide from debris exiting the plasma. The EUV source features a debris shield with curvilinear shield members that have light passages aligned to a focal point. Additionally, it may include a temperature control mechanism to regulate the temperature of the shell members, optimizing the geometry for reflections.
Career Highlights
Blumenstock's career is marked by his role at Cymer, Inc., where he has been instrumental in advancing EUV technology. His innovative work has positioned him as a key figure in the development of high-energy photon sources.
Collaborations
Throughout his career, Blumenstock has collaborated with notable colleagues, including William N Partlo and Igor Vladimirovich Fomenkov. These collaborations have contributed to the advancement of technology in the field of EUV light sources.
Conclusion
Gerry M Blumenstock's contributions to the field of extreme ultraviolet light sources demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in a way that meets the demands of modern production environments.