Company Filing History:
1 out of 1 
1 out of 23 
1 out of 1 Years Active: 2008
Title: Gerd Scheuring: Innovator in Optical Measurement Technologies
Introduction
Gerd Scheuring is a notable inventor based in Munich, Germany. He has made significant contributions to the field of optical measurement technologies, particularly in the semiconductor industry. With a total of 2 patents, his work has advanced the methods used for measuring structures on photo-masks.
Latest Patents
One of his latest patents is titled "Method for an automatic optical measuring of an OPC structure." This invention relates to a method for optical measurement of an OPC structure on a photo-mask. The method aims to determine a measurement of the structure in at least one direction. Initially, a region on the photo-mask is identified, which contains the OPC structure to be measured. The intensity of this region is scanned in a first direction, and the region where the intensity surpasses a threshold is determined for each scan. The maximum separation between an edge of the structure and an edge of the corresponding OPC structure is calculated based on the differences in the determined regions.
Another significant patent is the "Apparatus for measuring feature widths on masks for the semiconductor industry." This apparatus includes a carrier plate that is retained in a vibrationally decoupled manner within a base frame. A scanning stage is arranged on the carrier plate to hold the mask to be measured, which defines a surface. An objective is positioned opposite the mask, and a liquid is provided between the objective and the surface of the mask.
Career Highlights
Gerd Scheuring has worked with several prominent companies in the field. He has been associated with Muetec Automatisierte Mikroskopie und Messtechnik GmbH and Leica Microsystems Semiconductor GmbH. His experience in these organizations has contributed to his expertise in optical measurement technologies.
Collaborations
Throughout his career, Gerd has collaborated with notable professionals in the industry, including Hans-Juergen Brueck and Wolfgang Vollrath. These collaborations have further enriched his work and innovations.
Conclusion
Gerd Scheuring's contributions to optical measurement technologies have made a significant impact in the semiconductor industry. His innovative patents and collaborations highlight his expertise and dedication to advancing measurement methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.