The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
Sep. 17, 2004
Wolfgang Vollrath, Burbach, DE;
Frank Hillmann, Deggendorf, DE;
Gerd Scheuring, Munich, DE;
Hans-jürgen Brueck, Munich, DE;
Wolfgang Vollrath, Burbach, DE;
Frank Hillmann, Deggendorf, DE;
Gerd Scheuring, Munich, DE;
Hans-Jürgen Brueck, Munich, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
MueTec Automatisierta Mikroskopie und Messtechnik GmbH, Munich, DE;
Abstract
An apparatus for measuring feature widths on masksfor the semiconductor industry is disclosed. The apparatus encompasses a carrier platethat is retained in vibrationally decoupled fashion in a base frame; a scanning stage, arranged on the carrier plate, that carries a maskto be measured, the maskdefining a surface; and an objectivearranged opposite the mask. A liquidis provided between the objectiveand the surfaceof the mask