Frank Hillmann

Title: Frank Hillmann: Innovator in Semiconductor Measurement Technology

Introduction

Frank Hillmann is a notable inventor based in Deggendorf, Germany. He has made significant contributions to the semiconductor industry, particularly in the field of measurement technology. His innovative approach has led to the development of a unique apparatus that enhances the precision of feature width measurements on masks used in semiconductor manufacturing.

Latest Patents

Frank Hillmann holds a patent for an "Apparatus for measuring feature widths on masks for the semiconductor industry." This apparatus features a carrier plate that is retained in a vibrationally decoupled manner within a base frame. It includes a scanning stage that carries the mask to be measured, which defines a surface. An objective is positioned opposite the mask, and a liquid is provided between the objective and the surface of the mask, allowing for accurate measurements.

Career Highlights

Throughout his career, Frank has worked with prominent companies in the semiconductor sector. Notably, he has been associated with Leica Microsystems Semiconductor GmbH and Muetec Automatisierte Mikroskopie und Messtechnik GmbH. His work in these organizations has contributed to advancements in measurement technologies that are critical for semiconductor production.

Collaborations

Frank has collaborated with esteemed colleagues, including Wolfgang Vollrath and Gerd Scheuring. These partnerships have fostered innovation and have played a crucial role in the development of new technologies in the semiconductor industry.

Conclusion

Frank Hillmann's contributions to the semiconductor industry through his innovative patent and collaborations with industry professionals highlight his importance as an inventor. His work continues to influence the field of semiconductor measurement technology.