Location History:
- Milpitas, CA (US) (2009 - 2010)
- Fremont, CA (US) (2009 - 2015)
- Foster City, CA (US) (2021)
Company Filing History:
Years Active: 2009-2021
Title: Gaurav Keswani: Innovator in Fluid Actuation and Lithography Technology
Introduction
Gaurav Keswani is a prominent inventor based in Fremont, CA, known for his significant contributions to fluid actuation and lithography technology. With a total of 15 patents to his name, he has made remarkable advancements in the field, particularly through his work at Nikon Corporation.
Latest Patents
One of his latest patents is the Dual Valve Fluid Actuator Assembly. This innovative stage assembly includes a fluid actuator that moves the stage effectively. The actuator comprises a piston housing that defines a piston chamber, a piston that separates the chamber into two distinct areas, and valves that control the flow of working fluid into and out of the chamber. Notably, the supply and exhaust valves have orifices of different sizes, allowing for versatile configurations using multiple valves.
Another significant patent is related to apparatus and methods for maintaining immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine. This lithographic projection apparatus features a stage assembly with a substrate table that supports a substrate exposed to an exposure beam through immersion liquid. The design includes a confinement member and a movable member that optimizes the exposure process.
Career Highlights
Gaurav Keswani has established himself as a key figure in the field of innovation, particularly through his work at Nikon Corporation. His expertise in fluid dynamics and optical systems has led to groundbreaking developments that enhance the efficiency and effectiveness of lithography processes.
Collaborations
Throughout his career, Gaurav has collaborated with notable colleagues, including Alex Ka Tim Poon and Leonard Wai Fung Kho. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Gaurav Keswani's contributions to fluid actuation and lithography technology exemplify the spirit of innovation. His patents reflect a deep understanding of complex systems and a commitment to advancing the field. His work continues to influence the industry and inspire future inventors.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.