The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2021
Filed:
Feb. 12, 2018
Nikon Corporation, Tokyo, JP;
Alex Ka Tim Poon, San Ramon, CA (US);
Yeong-Jun Choi, San Ramon, CA (US);
Pai-Hsueh Yang, Palo Alto, CA (US);
Sandy Lee, Dublin, CA (US);
Gaurav Keswani, Foster City, CA (US);
Rocky Mai, San Mateo, CA (US);
Abstract
A stage assembly () includes a stage (), and a fluid actuator assembly () that moves the stage (). The fluid actuator assembly () includes a piston housing () that defines a piston chamber (); (ii) a piston () that separates the piston chamber () into a first chamber (A) and a second chamber (B); (iii) a supply valve (C) that controls the flow of the working fluid () into the first chamber (A); and (iv) an exhaust valve (D) that controls the flow of the working fluid () out of the first chamber (A). The supply valve (C) has a supply orifice (G) having a supply orifice area, and the exhaust valve (D) has an exhaust orifice (G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (A), (B).