The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Jun. 25, 2012
Alex Poon, San Ramon, CA (US);
Leonard Kho, San Francisco, CA (US);
Gaurav Keswani, Fremont, CA (US);
Derek Coon, Redwood City, CA (US);
Daishi Tanak, Kounosu, JP;
Alex Poon, San Ramon, CA (US);
Leonard Kho, San Francisco, CA (US);
Gaurav Keswani, Fremont, CA (US);
Derek Coon, Redwood City, CA (US);
Daishi Tanak, Kounosu, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Apparatus and methods keep immersion liquid in a space adjacent to an optical assembly. An optical assembly projects an image onto a substrate supported adjacent to the optical assembly by a substrate table. An insertion member insertable into the space between the optical assembly and the substrate, the substrate table, or both, divides the immersion liquid into a first portion and a second portion, the first portion disposed between the optical assembly and the insertion member, and the second portion disposed between the insertion member and the substrate, the substrate table, or both. The insertion member keeps the optical assembly in contact with the first portion when the substrate is moved away from being disposed adjacent to the optical assembly.