This inventor holds 2 USPTO granted patents. Top assignee: Nikon Corporation. Active years: 2012-2013.
Company Filing History:
Years Active: 2012-2013
Title: Innovations by Inventor Alex Poon
Introduction
Alex Poon is a notable inventor based in San Ramon, CA (US). He has made significant contributions to the field of optical assembly and immersion lithography. With a total of 2 patents, his work has advanced the technology used in wafer exchange processes.
Latest Patents
Among his latest patents is an innovative apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine. This invention involves an optical assembly that projects an image onto a substrate supported by a substrate table. The design includes an insertion member that can be inserted into the space between the optical assembly and the substrate, effectively dividing the immersion liquid into two portions. The first portion is maintained between the optical assembly and the insertion member, while the second portion is positioned between the insertion member and the substrate or substrate table. This mechanism ensures that the optical assembly remains in contact with the first portion of immersion liquid when the substrate is moved away.
Career Highlights
Alex Poon is currently employed at Nikon Corporation, where he continues to innovate in the field of optical technologies. His work has been instrumental in enhancing the efficiency and effectiveness of immersion lithography machines.
Collaborations
Throughout his career, Alex has collaborated with talented individuals such as Gaurav Keswani and Leonard Kho. These collaborations have contributed to the development of cutting-edge technologies in the industry.
Conclusion
In summary, Alex Poon is a distinguished inventor whose work in immersion lithography has led to significant advancements in optical assembly technologies. His contributions continue to shape the future of this field.