Company Filing History:
Years Active: 2012-2025
Title: Leonard Kho: Innovator in Substrate Processing Systems
Introduction
Leonard Kho is a notable inventor based in San Francisco, CA. He holds a total of 3 patents that showcase his contributions to the field of substrate processing systems. His innovative work has significantly impacted the efficiency and functionality of various technologies.
Latest Patents
Kho's latest patents include a cleaning system designed for removing deposits from pumps in exhaust systems of substrate processing systems. This exhaust system incorporates a radical generator that generates halogen radicals from a gas mixture, enhancing the cleaning process. Another significant patent involves apparatus and methods for maintaining immersion fluid adjacent to an optical assembly during wafer exchanges in immersion lithography machines. This invention ensures that immersion liquid remains effectively positioned, optimizing the performance of optical assemblies during substrate processing.
Career Highlights
Throughout his career, Leonard Kho has worked with prominent companies such as Nikon Corporation and Lam Research Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in substrate processing technologies.
Collaborations
Kho has collaborated with talented individuals in the industry, including Alex Poon and Gaurav Keswani. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Leonard Kho's contributions to substrate processing systems through his patents and collaborations highlight his role as an influential inventor. His work continues to shape the future of technology in this field.