Location History:
- Hsin-Chu, TW (2004)
- Taipei, TW (2003 - 2005)
Company Filing History:
2 out of 41,047 
1 out of 833,002 Years Active: 2003-2005
Title: Innovations of Inventor Gau-Ming Lu
Introduction
Gau-Ming Lu is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on methods that enhance the efficiency and effectiveness of semiconductor processing.
Latest Patents
One of his latest patents is a method for plasma etching a wafer after backside grinding. This innovative method incorporates an oxidation pretreatment step, which begins with grinding the backside of a wafer to expose a bare silicon surface. The exposed silicon surface is then oxidized to form a uniform silicon oxide layer, which is crucial for the subsequent plasma etching process. This method is particularly advantageous for removing organic material layers, such as photoresist layers, from wafer surfaces.
Another significant patent involves improving photoresist adhesion on a metal layer after rework. This method includes forming an anti-reflective coating (ARC) layer over an upper exposed metal layer, followed by the application of a photoresist layer. After the first photoresist layer is removed, the ARC layer's surface is roughened to enhance the adhesion of a second photoresist layer. This innovation addresses challenges in semiconductor manufacturing, ensuring better performance and reliability.
Career Highlights
Gau-Ming Lu has worked with Taiwan Semiconductor Manufacturing Company Limited, where he has contributed to various advancements in semiconductor technology. His experience in this leading company has allowed him to refine his skills and innovate in the field.
Collaborations
Throughout his career, Gau-Ming Lu has collaborated with notable professionals, including Yeong-Rong Chang and Dowson Jang. These collaborations have further enriched his work and contributed to the development of innovative solutions in semiconductor processing.
Conclusion
Gau-Ming Lu's contributions to semiconductor technology through his patents and career achievements highlight his role as a significant inventor in the field. His innovative methods continue to influence the industry and improve semiconductor manufacturing processes.