Company Filing History:
4 out of 1,787 
2 out of 528 
1 out of 13,684 
Years Active: 2002-2024
Title: Innovations of Francis Chilese
Introduction
Francis Chilese is an accomplished inventor based in San Ramon, CA (US). He holds a total of 7 patents that showcase his expertise in vacuum systems and optical technologies. His innovative contributions have significantly impacted the fields of lithography and optical inspection.
Latest Patents
One of his latest patents is for a Dual Vacuum Seal. This vacuum system features a wall of a vacuum chamber, a flange, an outer seal, and an inner seal. The outer seal is made from a first material, while the inner seal is composed of a second material that is distinct from the first. The inner seal is positioned closer to the interior of the vacuum chamber and is separated from the outer seal by a gap. This design allows the outer seal to provide a tighter vacuum seal than the inner seal, which is more resistant to gases used for cleaning the vacuum chamber's interior. The system also includes a path to connect the gap to a vacuum pump for effective evacuation.
Another significant patent is the System and Method for Cleaning Optical Surfaces of an Extreme Ultraviolet Optical System. This invention creates a local clean microenvironment near the optical surfaces of an extreme ultraviolet (EUV) optical assembly. It is designed for use in vacuum process chambers and is essential for EUV lithography, metrology, or inspection. The system comprises one or more EUV optical assemblies, a supply of cleaning gas, and a gas delivery unit that includes a plenum chamber and delivery nozzles to direct cleaning gas to the optical assembly.
Career Highlights
Francis has worked with notable companies such as Kla Tencor Corporation and Kla Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the field.
Collaborations
Throughout his career, Francis has collaborated with talented individuals, including Rudy Flores Garcia and Gildardo Rios Delgado. These partnerships have fostered innovation and enhanced the development of his inventions.
Conclusion
Francis Chilese's contributions to the field of vacuum systems and optical technologies are noteworthy. His innovative patents and collaborations reflect his dedication to advancing technology and improving industry standards.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.