The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Feb. 10, 2014
Kla-tencor Corporation, Milpitas, CA (US);
Francis C. Chilese, San Ramon, CA (US);
John R. Torczynski, Albuquerque, NM (US);
Rudy Garcia, Union City, CA (US);
Leonard E. Klebanoff, Dublin, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Daniel J. Rader, Albuquerque, NM (US);
Anthony S. Geller, Albuquerque, NM (US);
Michail A. Gallis, Albuquerque, NM (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Sandia Corporation, Albuquerque, NM (US);
Abstract
An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.