Michail A Gallis

Title: Michail A Gallis: Innovator in Extreme Ultraviolet Light Technology

Introduction

Michail A Gallis is a prominent inventor based in Albuquerque, NM (US). He has made significant contributions to the field of extreme ultraviolet (EUV) light technology, holding a total of 6 patents. His work focuses on methods and apparatuses that enhance the efficiency and effectiveness of EUV applications.

Latest Patents

Gallis's latest patents include innovative solutions such as "Methods and apparatus for use with extreme ultraviolet light having contamination protection." This patent describes an apparatus designed to utilize EUV light while minimizing contamination risks. The apparatus features a duct with multiple openings and an optical component that effectively manages the flow of low-pressure gas, ensuring high transmission of EUV light. Another notable patent is "Particle control near reticle and optics using showerhead," which presents a method to protect reticles from particles and chemicals during EUV inspections. This method employs porous metal diffusers to create a clean gas flow, isolating the reticle surface from potential contaminants.

Career Highlights

Throughout his career, Michail A Gallis has worked with esteemed organizations such as Sandia Corporation and Kla Tencor Corporation. His experience in these companies has allowed him to develop and refine his innovative ideas in the realm of EUV technology.

Collaborations

Gallis has collaborated with notable colleagues, including John R Torczynski and Charles R Bryan. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.

Conclusion

Michail A Gallis stands out as a key figure in the innovation of extreme ultraviolet light technology. His patents and career achievements reflect his dedication to advancing this critical field.