Feng Bi

Title: Innovations by Inventor Feng Bi

Introduction

Feng Bi is a notable inventor based in Cupertino, CA, with a focus on advancements in semiconductor processing technologies. He holds a total of 3 patents that reflect his innovative contributions to the field.

Latest Patents

One of his latest patents is a "Showerhead with air-gapped plenums and overhead isolation gas distributor." This invention provides showerheads designed for independently delivering different, mutually-reactive process gases to a wafer processing space. The design includes a first gas distributor with multiple plenum structures separated by gaps, along with a second gas distributor positioned above it. The isolation gas from the second distributor flows down onto the first, creating an isolation gas curtain that prevents process gases from parasitically depositing on other plenum structures.

Another significant patent is for a "Cleaning process for removing boron-carbon residuals in processing chamber at high temperature." This method involves using water vapor plasma treatment to remove a boron-carbon layer from the surface of a processing chamber. The process includes positioning the pedestal at varying distances from the showerhead and exposing the boron-carbon layer to plasma processes that generate water vapor and carrier gases.

Career Highlights

Feng Bi has worked with prominent companies in the semiconductor industry, including Lam Research Corporation and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in developing innovative solutions for semiconductor processing.

Collaborations

Feng has collaborated with notable coworkers such as Nagraj Shankar and Jeffrey D. Womack, further enhancing his contributions to the field through teamwork and shared expertise.

Conclusion

Feng Bi's innovative patents and career in the semiconductor industry highlight his significant contributions to technology. His work continues to influence advancements in wafer processing and cleaning methods.