Lam Research Corporation

Applied Materials, Inc.

Feng Bi

Nagraj Shankar

Kapu Sirish Reddy

Meliha Gozde Rainville

Jeffrey D Womack

Pengyi Zhang

Elham Mohimi

Emile C Draper

Pankaj G Ramnani

Kwangduk Douglas Lee

Prashant Kumar Kulshreshtha

Paul Dennis Connors

Showerheads for independently delivering different, mutually-reactive process gases to a wafer processing space are provided. The showerheads include a first gas distributor that has multiple plenum structures that are separated from one another by a gap, as well as a second gas distributor positioned above the first gas distributor. Isolation gas from the second gas distributor may be flowed down onto the first gas distributor and through the gaps in between the plenum structures of the first gas distributor, thereby establishing an isolation gas curtain that prevents the process gases released from each plenum structure from parasitically depositing on the plenum structures that provide other gases.

Showerhead with air-gapped plenums and overhead isolation gas distributor

Embodiments of the invention generally relate to methods for removing a boron-carbon layer from a surface of a processing chamber using water vapor plasma treatment. In one embodiment, a method for cleaning a surface of a processing chamber includes positioning the pedestal at a first distance from the showerhead, and exposing a deposited boron-carbon layer to a first plasma process where the first plasma process comprises generating a plasma that comprises water vapor and a first carrier gas by biasing a showerhead that is disposed over a pedestal, and positioning the pedestal at a second distance from the showerhead and exposing the deposited boron-carbon layer to a second plasma process where the second plasma process comprises generating a plasma that comprises water vapor and a second carrier gas by biasing the showerhead and biasing a side electrode relative to the showerhead.

Cleaning process for removing boron-carbon residuals in processing chamber at high temperature

Growing community of inventors

Cupertino, CA, United States of America

Feng Bi