Tokyo, Japan

Etsuro Morita


Average Co-Inventor Count = 4.5

ph-index = 3

Forward Citations = 30(Granted Patents)


Company Filing History:


Years Active: 2003-2012

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4 patents (USPTO):Explore Patents

Title: **Etsuro Morita: A Pioneer in Semiconductor Manufacturing**

Introduction

Etsuro Morita, an inventive mind based in Tokyo, Japan, has made significant contributions to the field of semiconductor manufacturing through his innovative designs and methodologies. With a patent portfolio that includes four notable inventions, Morita has established himself as a leading figure in the industry.

Latest Patents

Among his latest patents, Morita has developed a groundbreaking **Method of Manufacturing Semiconductor Wafer**. This method includes a unique approach to differentiate the glossiness of the front and rear surfaces of the wafer during manufacturing. By utilizing a carrier plate with a wafer holding hole and employing a circular motion without rotation, this technique allows for simultaneous polishing of both surfaces. Notably, the method incorporates various abrasive materials tailored for specific polishing needs.

Additionally, Morita holds a patent for the **Method for Manufacturing SOI Wafer**. This innovative process facilitates the creation of thin silicon-on-insulator (SOI) layers with uniform thickness across the plane. The process starts with the formation of an oxygen ion implanted layer on an active layer wafer, which is then laminated to a base wafer with an embedded oxide film. The remaining portion is carefully polished or etched, resulting in a thin SOI layer ready for use.

Career Highlights

Morita has held significant roles in esteemed companies such as Sumitomo Mitsubishi Silicon Corporation and Mitsubishi Materials Silicon Corporation. His work at these firms has been pivotal in advancing semiconductor technology, reinforcing his status as a trusted inventor in this specialized field.

Collaborations

Throughout his career, Etsuro Morita has collaborated with esteemed professionals, including Toru Taniguchi and Satoshi Matagawa. These partnerships have enriched his research and have enabled the development of innovative solutions to meet the industry's evolving demands.

Conclusion

In conclusion, Etsuro Morita's contributions to the semiconductor manufacturing industry are exemplified by his inventive spirit and dedication to advancing technology. His latest patents reflect his commitment to creating efficient and effective manufacturing processes, which continue to influence the field today. As he collaborates with other talented professionals, the future looks promising for further innovations from this remarkable inventor.

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