Erlangen-Bruck, Germany

Ernst-Christian Richter


Average Co-Inventor Count = 2.6

ph-index = 2

Forward Citations = 69(Granted Patents)


Location History:

  • Erlangen, DE (2004)
  • Erlangen-Bruck, DE (2004 - 2006)

Company Filing History:


Years Active: 2004-2006

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10 patents (USPTO):Explore Patents

Title: Ernst-Christian Richter: Innovator in Semiconductor Technology

Introduction

Ernst-Christian Richter is a prominent inventor based in Erlangen-Bruck, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His innovative work focuses on processes that enhance the production and modification of resist structures, which are crucial in the manufacturing of electronic components.

Latest Patents

One of his latest patents is a process for producing hard masks. In this process, an initiator layer containing an initiator component is applied to a substrate. A photoresist is then used to create a pattern on the initiator layer, uncovering the initiator layer in the trenches of the pattern. Following this, a curable hard mask material is applied and selectively cured, ensuring that only the sections of the hard mask material adjacent to the initiator layer are cured. The uncured hard mask material is subsequently removed using a solvent, along with the lands formed from the resist. This pattern can then be transferred to the substrate, for example, using plasma.

Another notable patent involves a process for modifying resist structures and resist films from the aqueous phase. This process includes applying a chemically amplified resist to a substrate and structuring it in a customary manner. The amplification agent is applied in an aqueous phase to the structured resist, and after the chemical amplification is complete, excess agent is removed by an aqueous wash medium. This method avoids the use of organic solvents that pose an explosion hazard and suppresses the removal of partially exposed resist sections.

Career Highlights

Ernst-Christian Richter is currently associated with Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has been instrumental in advancing technologies that are essential for modern electronics.

Collaborations

Throughout his career, Richter has collaborated with notable colleagues, including Michael Sebald and Günther Czech. These collaborations have further enriched his contributions to the field of semiconductor technology.

Conclusion

Ernst-Christian Richter's innovative patents and contributions to semiconductor technology highlight his role as a key inventor in the industry. His work continues to influence the development of advanced electronic components, showcasing the importance of innovation in technology.

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