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Milpitas, CA, United States of America

Eric D Wagganer

USPTO Granted Patents = 4

Average Co-Inventor Count = 2.2

ph-index = 4

Forward Citations = 43(Granted Patents)

Location History:

Milpitas, CA (US) (2000 - 2003)
Fremont, CA (US) (2005)

Company Filing History:

Lam Research Corporation

Years Active: 2000-2005

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6949460 - Line edge roughness reduction for trench etch (2005-09-27),

2. 6630407 - Plasma etching of organic antireflective coating (2003-10-07),

3. 6540885 - Profile control of oxide trench features for dual damascene applications (2003-04-01),

4. 6146986 - Lithographic method for creating damascene metallization layers (2000-11-14),

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