This inventor holds 4 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2000-2005.
Location History:
- Milpitas, CA (US) (2000 - 2003)
- Fremont, CA (US) (2005)
Company Filing History:
Years Active: 2000-2005
Title: The Innovative Contributions of Eric D. Wagganer
Introduction
Eric D. Wagganer is a notable inventor based in Milpitas, CA (US). He has made significant contributions to the field of semiconductor manufacturing, holding a total of 4 patents. His work focuses on improving etching processes, which are crucial in the production of semiconductor devices.
Latest Patents
Wagganer's latest patents include innovative methods for enhancing trench etching and plasma etching processes. One of his patents, titled "Line edge roughness reduction for trench etch," describes a method for etching a trench to a specific depth in a dielectric layer over a substrate. This process involves applying an anti-reflective coating (ARC) over the dielectric layer and forming a photoresist mask. The trench is then etched with a selectivity ratio between the dielectric and photoresist layers.
Another significant patent is "Plasma etching of organic antireflective coating," which outlines a semiconductor manufacturing process where an organic ARC is plasma etched. This method utilizes a fluorine-free etchant gas, including carbon and nitrogen-containing gases, to achieve a high etch rate. The process is particularly useful for etching contact or via openings in damascene and self-aligned contact structures.
Career Highlights
Eric D. Wagganer is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His expertise in etching technologies has contributed to advancements in manufacturing processes, enhancing the efficiency and effectiveness of semiconductor production.
Collaborations
Wagganer has collaborated with notable colleagues, including Douglas L. Keil and Daniel Le. These partnerships have fostered innovation and development in the semiconductor field, leading to the successful implementation of new technologies.
Conclusion
Eric D. Wagganer's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his significant role in advancing technology in this critical industry. His work continues to influence the efficiency of semiconductor production processes.