Location History:
- Yamanashi, JP (2015 - 2018)
- Nirasaki, JP (2012 - 2022)
Company Filing History:
Years Active: 2012-2025
Title: Einosuke Tsuda: Innovator in Plasma Processing Technology
Introduction
Einosuke Tsuda is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 9 patents. His work focuses on developing advanced devices that enhance the efficiency and effectiveness of plasma processing.
Latest Patents
One of Tsuda's latest patents is an electrostatic chuck and method of operation for plasma processing. This invention features an electrostatic chuck (ESC) designed to hold a workpiece in a plasma processing chamber. The ESC includes a monolithic insulating substrate with a top surface and a plurality of electrodes embedded in the substrate. These electrodes are arranged in a multipolar configuration to receive multiple DC bias signals from a first power supply circuit. Additionally, a radio frequency (RF) electrode is embedded in the insulating substrate, allowing for the generation of an RF signal.
Another notable patent is a stage device and substrate processing apparatus. This stage device comprises a stage with a pin hole and a placement surface for a substrate. It includes at least one lift pin that moves up and down through the pin hole, along with a lifter that raises and lowers the lift pin. The stage is equipped with a first heating part to heat the stage, while the lift pin has a second heating part to ensure optimal processing conditions.
Career Highlights
Einosuke Tsuda is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in the development of plasma processing technologies.
Collaborations
Throughout his career, Tsuda has collaborated with notable colleagues, including Seishi Murakami and Takayuki Kamaishi. These partnerships have contributed to the advancement of technology in their field.
Conclusion
Einosuke Tsuda's contributions to plasma processing technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.