Dror Alumot

Title: Dror Alumot: Innovator in Optical Metrology

Introduction

Dror Alumot is a distinguished inventor based in Rehovot, Israel, known for his significant contributions to the field of optical metrology. With a total of four patents to his name, Dror has made remarkable advancements that enhance measurement accuracy in various applications.

Latest Patents

Dror's latest patents focus on improving accuracy in optical metrology. One of his notable inventions involves methods, metrology modules, and target designs that enhance the precision of metrology measurements. These methods allow for flexible handling of multiple measurement recipes and setups, relating them to landscape features that indicate their connection to resonance regions and flat areas. Techniques such as clustering of recipes, self-consistency tests, and noise reduction are employed to achieve cumulative improvements in measurement accuracy. Another significant patent describes an overlay metrology system that includes processors connected to an illumination source and a detector. This system generates overlay sensitivity calibration parameters based on differential measurements of calibration targets, allowing for precise overlay measurements.

Career Highlights

Throughout his career, Dror has worked with prominent companies in the industry, including Kla Tencor Corporation and Kla Corporation. His experience in these organizations has contributed to his expertise in optical metrology and innovation.

Collaborations

Dror has collaborated with notable colleagues such as Liran Yerushalmi and Eran Amit, further enhancing his work in the field.

Conclusion

Dror Alumot's innovative contributions to optical metrology demonstrate his commitment to advancing measurement accuracy through his patents and collaborative efforts. His work continues to influence the industry and pave the way for future innovations.