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For the Inventor, By the Inventor

Seoul, South Korea

Dougyong Sung

USPTO Granted Patents = 24 

Average Co-Inventor Count = 5.8

ph-index = 3

Forward Citations = 38(Granted Patents)


Company Filing History:

goldMedal24 out of 131,611 
 
Samsung Electronics Co., Ltd.
 patents

Years Active: 2016-2025

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24 patents (USPTO):Explore Patents
1. 12489011 - Chuck assembly, fabrication system therewith, and method of fabricating semiconductor device using the same (2025-12-02),
2. 12444590 - Plasma sensor module (2025-10-14),
3. 12327709 - Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same (2025-06-10),
4. 12210045 - Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig (2025-01-28),
5. 12020903 - Plasma etching method and semiconductor device fabrication method including the same (2024-06-25),
6. 11948777 - Method of manufacturing semiconductor device (2024-04-02),
7. 11658039 - Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method (2023-05-23),
8. 11605529 - Plasma processing apparatus (2023-03-14),
9. 11545341 - Plasma etching method and semiconductor device fabrication method including the same (2023-01-03),
10. 11384433 - Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same (2022-07-12),
11. 11282679 - Plasma control apparatus and plasma processing system including the same (2022-03-22),
12. 11251022 - Gas supply assembly and substrate processing apparatus including the same (2022-02-15),
13. 11075089 - Method of plasma etching and method of fabricating semiconductor device using the same (2021-07-27),
14. 11075088 - Method of plasma etching and method of fabricating semiconductor device using the same (2021-07-27),
15. 10971333 - Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same (2021-04-06),

Title: Dougyong Sung: Innovator in Semiconductor Technology

Introduction

Dougyong Sung is a prominent inventor based in Seoul, South Korea, recognized for his significant contributions in the field of semiconductor technology. With an impressive portfolio of 21 patents, Sung has been at the forefront of innovations that enhance semiconductor manufacturing processes.

Latest Patents

Among his latest inventions are two notable patents: the "Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig" and the "Plasma etching method and semiconductor device fabrication method including the same". The impedance measurement jig is designed to facilitate the precise measurement of impedances related to electrostatic chucks and focus rings in substrate-processing apparatuses. This jig incorporates several components, such as contact plates, a cover plate, a plug, and an analyzer, which collectively allow for detailed inspection during manufacturing processes.

The plasma etching method involves utilizing specialized power sources to create and concentrate plasma effectively on substrates, which plays a critical role in fabricating semiconductor devices. By incorporating innovative pulse power techniques, this method enhances efficiency and precision in semiconductor production.

Career Highlights

Dougyong Sung is currently affiliated with Samsung Electronics Co., Ltd., where he leverages his expertise in semiconductor technology to drive innovative solutions. His career at Samsung has been marked by a commitment to developing advanced technologies that meet the evolving demands of the electronics industry.

Collaborations

Sung has collaborated with esteemed colleagues, including Seungbo Shim and Myungsun Choi. Together, they have contributed to groundbreaking advancements within the semiconductor field, emphasizing teamwork and shared expertise as crucial elements of their success.

Conclusion

Dougyong Sung stands out as a significant figure in semiconductor innovation, with a strong track record of patents that demonstrate his inventive prowess. His contributions not only advance technology but also enhance the capabilities of manufacturing processes in an industry that continually seeks improvement and efficiency.

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