Seoul, South Korea

Dougyong Sung

This inventor holds 29 USPTO granted patents and 19 published patent applications, primarily in Semiconductor Processing. Top assignees: Samsung Electronics Co., Ltd., Samsung Electronics Ltd.. Active years: 2016-2026.

USPTO Granted Patents = 29 

% Patents Active = 100.0

Average Co-Inventor Count = 6.0

ph-index = 3

Forward Citations = 40(Granted Patents)


Company Filing History:


Years Active: 2016-2026

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Areas of Expertise:
Substrate Processing
Plasma Etching
Semiconductor Devices
Gas Injection Module
Electrostatic Chucks
Plasma Control
Impedance Measurement
Plasma Sensors
Light Detection
Chuck Assembly
Fabrication Methods
Processing Apparatus
29 patents (USPTO):Explore Patents

Title: Dougyong Sung: Innovator in Semiconductor Technology

Introduction

Dougyong Sung is a prominent inventor based in Seoul, South Korea, recognized for his significant contributions in the field of semiconductor technology. With an impressive portfolio of 21 patents, Sung has been at the forefront of innovations that enhance semiconductor manufacturing processes.

Latest Patents

Among his latest inventions are two notable patents: the "Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig" and the "Plasma etching method and semiconductor device fabrication method including the same". The impedance measurement jig is designed to facilitate the precise measurement of impedances related to electrostatic chucks and focus rings in substrate-processing apparatuses. This jig incorporates several components, such as contact plates, a cover plate, a plug, and an analyzer, which collectively allow for detailed inspection during manufacturing processes.

The plasma etching method involves utilizing specialized power sources to create and concentrate plasma effectively on substrates, which plays a critical role in fabricating semiconductor devices. By incorporating innovative pulse power techniques, this method enhances efficiency and precision in semiconductor production.

Career Highlights

Dougyong Sung is currently affiliated with Samsung Electronics Co., Ltd., where he leverages his expertise in semiconductor technology to drive innovative solutions. His career at Samsung has been marked by a commitment to developing advanced technologies that meet the evolving demands of the electronics industry.

Collaborations

Sung has collaborated with esteemed colleagues, including Seungbo Shim and Myungsun Choi. Together, they have contributed to groundbreaking advancements within the semiconductor field, emphasizing teamwork and shared expertise as crucial elements of their success.

Conclusion

Dougyong Sung stands out as a significant figure in semiconductor innovation, with a strong track record of patents that demonstrate his inventive prowess. His contributions not only advance technology but also enhance the capabilities of manufacturing processes in an industry that continually seeks improvement and efficiency.

Profile summary based on public USPTO records.
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