Douglas E Ruth

Title: Innovations of Douglas E Ruth

Introduction

Douglas E Ruth is an accomplished inventor based in Sunnyvale, CA. He holds a total of 4 patents that showcase his expertise in imaging metrology. His work has significantly contributed to advancements in the field, particularly in the integration of imaging technology with processing stations.

Latest Patents

One of his notable inventions is an apparatus for imaging metrology. This invention may be integrated with a processor station, allowing the metrology station to be apart from but coupled to a process station. The metrology station is equipped with a first imaging camera that has a field of view containing the measurement region. Alternate embodiments of this invention include a second imaging camera with a different field of view. Preferred embodiments utilize a broadband ultraviolet light source, although other versions may employ visible or near-infrared light sources of varying optical bandwidths. Typically, embodiments featuring a broad bandwidth source include a spectrograph or an imaging spectrograph. Some designs may also incorporate curved, reflective optics or a measurement region that is wetted by a liquid. In a typical configuration, the metrology station and the measurement region are designed to have four degrees of freedom of movement relative to each other.

Career Highlights

Throughout his career, Douglas has worked with prominent companies such as Therma-Wave, Inc. and Tokyo Electron Limited. His contributions in these organizations have further solidified his reputation as a leading inventor in his field.

Collaborations

Douglas has collaborated with notable coworkers, including Fred E Stanke and Clinton Carlisle. Their collective efforts have contributed to the success of various projects and innovations.

Conclusion

Douglas E Ruth's work in imaging metrology exemplifies his innovative spirit and dedication to advancing technology. His patents and collaborations reflect his significant impact on the industry.