Company Filing History:
Years Active: 2001-2013
Title: The Innovations of Donald N Polner
Introduction
Donald N Polner is a notable inventor based in Marblehead, MA (US), recognized for his contributions to semiconductor manufacturing technology. With a total of five patents to his name, Polner has made significant advancements in airflow management and cooling systems for web deposition processes.
Latest Patents
One of Polner's latest patents is focused on airflow management for particle abatement in semiconductor manufacturing equipment. This innovative system is designed to create and manage a controlled particle-free environment for handling semiconductor wafers. The apparatus serves as an interface between an equipment front end module (EFEM) and a vacuum loadlock chamber, enabling relative motion between enclosures while maintaining a particle-free environment through a moving air diffuser.
Another significant patent is for a cooling apparatus for a web deposition system. This invention includes an inner cylinder coupled to a gas source and an outer cylinder that supports a web. The outer cylinder rotates around the inner cylinder, allowing gas to flow through apertures to enhance heat transfer. This design not only limits the volume of gas introduced into the vacuum deposition chamber but also enables higher deposition rates and increased productivity.
Career Highlights
Throughout his career, Polner has worked with prominent companies such as Axcelis Technologies, Inc. and Aventa Technologies, Inc. His experience in these organizations has contributed to his expertise in semiconductor manufacturing and related technologies.
Collaborations
Polner has collaborated with notable colleagues, including Edward K McIntyre and Donald E DeLuca, further enhancing his innovative work in the field.
Conclusion
Donald N Polner's contributions to semiconductor manufacturing through his patents and career achievements highlight his role as a significant inventor in the industry. His work continues to influence advancements in technology and productivity in semiconductor processes.
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