Company Filing History:
Years Active: 2012-2014
Title: Dietmar Neugebauer: Innovator in Optical Systems
Introduction
Dietmar Neugebauer is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of optical systems, particularly in microlithographic projection exposure apparatuses. With a total of 3 patents to his name, Neugebauer's work has advanced the technology used in precision optics.
Latest Patents
One of Neugebauer's latest patents is an optical system designed for microlithographic projection exposure apparatuses. This system includes a first optical component, a second optical component, and a measurement arrangement that determines the relative position of these components in six degrees of freedom. The measurement arrangement is capable of assessing the relative position over six different length measurement sections, which extend directly between the two optical components.
Another significant patent involves a method for measuring the shape of an optical surface using computationally combined surface region measurements and an interferometric measuring device. This method entails providing an interferometric measuring device that generates a measurement wave. The device and the test object are arranged at various measurement positions, allowing different regions of the optical surface to be illuminated. The actual shape of the optical surface is then determined by computationally combining the surface region measurements based on the positional coordinates of the measuring device.
Career Highlights
Throughout his career, Neugebauer has worked with prominent companies in the optics industry, including Carl Zeiss SMT GmbH and Carl Zeiss SMS Ltd. His experience in these organizations has contributed to his expertise in optical systems and measurement technologies.
Collaborations
Neugebauer has collaborated with notable colleagues such as Albrecht Hof and Rolf Freimann. These partnerships have likely enriched his work and led to innovative advancements in the field.
Conclusion
Dietmar Neugebauer's contributions to optical systems and measurement technologies have established him as a significant figure in the field. His patents reflect a commitment to innovation and precision in optics.
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