The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Mar. 12, 2012
Rolf Freimann, Aalen, DE;
Bernd Doerband, Aalen, DE;
Stefan Schulte, Aalen-Waldhausen, DE;
Albrecht Hof, Aalen, DE;
Frank Riepenhausen, Oberkochen, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Dietmar Neugebauer, Aalen, DE;
Helmut Issler, Aalen-Ebnat, DE;
Armin Bich, Aalen, DE;
Rolf Freimann, Aalen, DE;
Bernd Doerband, Aalen, DE;
Stefan Schulte, Aalen-Waldhausen, DE;
Albrecht Hof, Aalen, DE;
Frank Riepenhausen, Oberkochen, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Dietmar Neugebauer, Aalen, DE;
Helmut Issler, Aalen-Ebnat, DE;
Armin Bich, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
Measuring a shape of an optical surface () of a test object () includes: providing an interferometric measuring device () generating a measurement wave (); arranging the measuring device () and the test object () consecutively at different measurement positions relative to each other, such that different regions () of the optical surface () are illuminated by the measurement wave (); measuring positional coordinates of the measuring device () at the different measurement positions in relation to the test object (); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave () after interaction with the respective region () of the optical surface () using the measuring device () in each of the measurement positions; and determining the actual shape of the optical surface () by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device () at each of the measurement positions.